Schottky Barrier Height Control by Using Knock-on Effect in Ion Implantation

• 1 January 1977
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 16  (S1) , 53
• https://doi.org/10.7567/jjaps.16s1.53

Abstract

Keywords

• SCHOTTKY BARRIER
• ION IMPLANTATION
• USING KNOCK
• HEIGHT CONTROL
• BARRIER HEIGHT