Dependence of Surface Flatness on the LPE Condition of AlGaSb

• 1 November 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (11) , 2061-2062
• https://doi.org/10.1143/jjap.17.2061

Abstract

Keywords

• LPE CONDITION
• SURFACE FLATNESS
• DEPENDENCE OF SURFACE
• CONDITION OF ALGASB