Growth and characterization of cubic boron nitride thin films

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 12  (6) , 3074-3081
• https://doi.org/10.1116/1.578938

Abstract

Keywords

• NITRIDES
• ELECTRON BEAM
• CRYSTAL STRUCTURE
• DIMENSIONS
• THIN FILM
• ION BEAM
• THIN FILMS
• FOURIER TRANSFORM INFRARED SPECTROSCOPY
• NITROGEN
• MATERIALS SCIENCE
• DEPOSITION
• BEAMS
• HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY
• SINGLE CRYSTAL
• CRYSTAL LATTICES
• NUCLEATION
• FILMS