Electrically tuneable micromachined fabry-perot interferometer in gas analysis
- 1 January 1997
- journal article
- Published by IOP Publishing in Physica Scripta
- Vol. T69, 119-121
- https://doi.org/10.1088/0031-8949/1997/t69/018
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Surface micromachined tuneable interferometer arraySensors and Actuators A: Physical, 1994