Direct photoetching of single crystal SiC by VUV-266 nm multiwavelength laser ablation

• 1 April 1997
• journal article
• research article
• Published by Springer Nature in Applied Physics A
• Vol. 64  (4) , 367-371
• https://doi.org/10.1007/s003390050492

Abstract

Keywords

• PACS: 42.60
• 81.60
• 85.30