Ultrasonic manometers for low and medium vacua under development at the National Bureau of Standards
- 1 January 1977
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 14 (1) , 597-605
- https://doi.org/10.1116/1.569158
Abstract
The first part of this paper describes the use of ultrasonic interferometry for the measurement of the lengths of manometer columns. The major known sources of errors of manometers are then analyzed, and design criteria are developed which reduce these errors below set limits. Finally, two ultrasonic manometers now being developed at the National Bureau of Standards for measurements in the low and medium vacuum ranges are described. The ultrasonic mercury manometer, with a range of 13 kPa, has been operated with a resolution of 1.4 mPa.Keywords
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