The fabrication of an electrostatic linear actuator by silicon micromachining
- 1 June 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 35 (6) , 731-734
- https://doi.org/10.1109/16.2524
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Effects of Material and Processing Parameters on the Dielectric Strength of Thermally Grown SiO[sub 2] FilmsJournal of the Electrochemical Society, 1970
- Electrostatic sources of electric powerElectrical Engineering, 1947