Analysis of a-C:H superhard coatings by scanning Auger microscope and target factor analysis
- 1 December 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 206 (1-2) , 330-334
- https://doi.org/10.1016/0040-6090(91)90445-4
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Amorphous hydrogenated carbon films on semiconductorsApplied Physics A, 1989
- Amorphous hydrogenated carbon films on semiconductorsApplied Physics A, 1989
- Surface and in-depth analysis of hydrogenated carbon layers on silicon and germanium by mass and electron spectroscopyJournal of Vacuum Science & Technology B, 1989
- Depth profile analysis of hydrogenated carbon layers on silicon by x-ray photoelectron spectroscopy, Auger electron spectroscopy, electron energy-loss spectroscopy, and secondary ion mass spectrometryJournal of Vacuum Science & Technology A, 1987
- Hard carbon coatings with low optical absorptionApplied Physics Letters, 1983