Plasma Chemical Vapor Deposition of SiO2 on Air‐Exposed Surfaces by Cold Plasma Torch
- 1 August 1995
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 142 (8) , 2726-2730
- https://doi.org/10.1149/1.2050082
Abstract
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