Effect of ion implantation on fracture stress of Al2O3
- 1 March 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 7-8, 521-525
- https://doi.org/10.1016/0168-583x(85)90425-2
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Volume expansion and annealing compaction of ion-bombarded single-crystal and polycrystalline α-Al2O3Journal of Applied Physics, 1978
- Role of integrated lateral stress in surface deformation of He-implanted surfacesJournal of Applied Physics, 1977