A new empirical formula for the sputtering yield
- 1 January 1982
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 68 (3) , 83-87
- https://doi.org/10.1080/01422448208226913
Abstract
A new empirical formula for the sputtering yield at the normal incidence has been proposed. It is found that the new empirical formula can predict well the energy-dependence of the sputtering yield for various ion-target combinations. Another interesting conclusion is that one of the adjustable parameters of the new formula shows the Z2-oscillation.Keywords
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