The epitaxy of silicon on quartz

• 2 June 1968
• journal article
• research article
• Published by International Union of Crystallography (IUCr) in Journal of Applied Crystallography
• Vol. 1  (2) , 70-82
• https://doi.org/10.1107/s0021889868005030

Abstract

Keywords

• SILICON
• PYROLYSIS
• MOBILITY
• FILMS
• EPITAXIC
• CHEMICAL REACTION
• QUARTZ
• ORIENTATION
• HYDROGEN
• FILM THICKNESS