Wafer-Level ANA Calibrations at NIST
- 1 November 1989
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 16, 11-25
- https://doi.org/10.1109/arftg.1989.323952
Abstract
The National Institute of Standards and Technology has begun a program supporting on-wafer scattering parameter measurements. In contrast to many previous NIST endeavors, this program seeks to transfer methodology into industrial measurement laboratories. The subject of this paper is the development of calibration techniques and algorithms, rather than physical standards, for the measurement of on-wafer scattering parameters. In particular, we discuss a TRL-based method which uses transmission lines as standards but includes redundant measurements to improve calibration accuracy and bandwidth.Keywords
This publication has 3 references indexed in Scilit:
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- On-line accuracy assessment for the dual six-port ANA: Treatment of systematic errorsIEEE Transactions on Instrumentation and Measurement, 1987
- On-line accuracy assessment for the dual six-port ANA: Extension to nonmating connectorsIEEE Transactions on Instrumentation and Measurement, 1987