Low-pressure sensors employing bossed diaphragms and precision etch-stopping

• 1 February 1990
• journal article
• Published by Elsevier in Sensors and Actuators A: Physical
• Vol. 21  (1-3) , 89-95
• https://doi.org/10.1016/0924-4247(90)85018-y

Abstract

Keywords

• LOW PRESSURE