Dependence of Resonance Frequency of a Membrane Vibrated Photothermally on Pressure and Geometry in a Low-Vacuum Region
- 1 February 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (2R)
- https://doi.org/10.1143/jjap.32.1001
Abstract
An experimental study of resonance frequency for a membrane vibrated photothermally in a low-vacuum region is described. The resonance frequency is decreased by the reaction force from gases around the vibrating membrane. Experimental values of resonance frequencies for various types of rectangular membranes in several kinds of gases agree well with theoretical ones.Keywords
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