Angle-of-incidence effects in electron-beam-deposited SnO2/Si solar cells

Abstract
The power‐conversion efficiency of SnO2/Si solar cells fabricated by electron‐beam evaporation of SnO2 is strongly dependent on the angle of incidence of the SnO2 vapor stream on silicon. The optimum angle of incidence is between 50° and 70°. Solar cells with power‐conversion efficiencies exceeding 10% have been reproducibly fabricated by depositing the SnO2 at angles of incidence in this optimum range.

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