An infrared pneumatic detector made by micromachining technology

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Abstract
We present a micromachined infrared IR detector based on the principle of the Golay cell. The detector basically consists of a sealed cavity, in which the heat generated by absorbed in light results in an increased gas pressure. This pressure rise is detected capacitively. The theoretical responsivity and noise equivalent of a micromachined device are calculated, and it is shown that a detectivity of 3.6*109 cm Hz1/2 W-1 can be expected for a 1 mm2 micromachined version. Further, we propose the use of a micromachined pneumatic gas leak in order to avoid thermal drift. A prototype was fabricated using Si and Pyrex micromachining techniques, and confirmed the principle of operation. The preliminary experimental results are compared to theory.

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