Metal-Nitride-Semiconductor Capacitors on 6H-SiC

• 1 February 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 264-268, 881-884
• https://doi.org/10.4028/www.scientific.net/msf.264-268.881

Abstract

Keywords

• CHARGE INSTABILITY
• POOLE-FRENKEL CONDUCTION