Nanometer scale lithography of silicon(100) surfaces using tapping mode atomic force microscopy

Publisher Website

1 May 1996

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology A

Vol. 14 (3) , 1208-1212
https://doi.org/10.1116/1.580268

Abstract

No abstract available

Keywords

ATOMIC FORCE MICROSCOPY

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