Comparison of different SiGe alloy buffer concepts for (SimGen)p superlattices

This publication has 16 references indexed in Scilit:

• Electronic Si/SiGe devices: Basics, technology, performance
  Published by Springer Nature ,2007
• Buffer concepts of ultrathin Sim Gen superlattices
  Thin Solid Films, 1992
• Investigation of Si1−xGex films and SimGen superlattices by x-ray diffraction
  Journal of Applied Physics, 1992
• High-electron-mobility Si/SiGe heterostructures: influence of the relaxed SiGe buffer layer
  Semiconductor Science and Technology, 1992
• Totally relaxed GexSi1−x layers with low threading dislocation densities grown on Si substrates
  Applied Physics Letters, 1991
• Anomalous strain relaxation in SiGe thin films and superlattices
  Physical Review Letters, 1991
• Chapter 4 Group-IV Compounds
  Published by Elsevier ,1990
• Surfactants in epitaxial growth
  Physical Review Letters, 1989
• Growth and properties of Si/SiGe superlattices
  Surface Science, 1986
• Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE
  Journal of the Electrochemical Society, 1986