Dielectric Properties and DC Conductivity of Vacuum-Deposited SiO Films

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Abstract
Dielectric properties from 10-2 to 107 c/s and dc conductivity are investigated for vacuum-deposited SiO films. The conductivity decreases with increasing oxidation and the activation energy is estimated to be 8.6 kcal/mole. Two dielectric dispersions are found, the loss peaks of which are at 10-1 c/s (1f dispersion) and at above 107 c/s (hf dispersion), respectively. The strength of 1f dispersion decreases with increasing oxidation and metallic impurities have no appreciable effect on the dispersion. The activation energy of 1f dispersion is almost equal to that to dc conduction. The dc conduction and 1f dispersion are concluded to be attributed to diffusion of free Si ions. The hf dispersion is ascribed to local torsional vibration of SiO chains. A model of the molecular structure of SiO in the glassy state is suggested, which is well consistent with the electrical and optical properties of this material.