High-Sensitivity Accelerometer Using Multilayer Piezoelectric Ceramics

1 September 1993

journal article
Published by IOP Publishing in Japanese Journal of Applied Physics

Vol. 32 (9S)
https://doi.org/10.1143/jjap.32.4209

Abstract

A high sensitivity accelerometer using multilayer piezoelectric ceramics including internal electrodes has been developed. The sensitivity of this accelerometer is about 900 pC/G at the frequency range from 0.01 to 10 Hz. Because the circuit was structed to cancel pyroelectric voltages, the output voltage changes of this accelerometer were decreased to 1/10 compared with the case of a noncanceling circuit.

Keywords

CERAMICS
ACCELEROMETER USING
USING MULTILAYER
MULTILAYER PIEZOELECTRIC
SENSITIVITY ACCELEROMETER
VOLTAGES
STRUCTED
CANCEL

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