Low Temperature Oxidation of Silicon Studied by Photosensitive ESR and Auger Electron Spectroscopy
- 1 January 1976
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 123 (1) , 26-29
- https://doi.org/10.1149/1.2132758
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: