Internal Stress of Cubic Boron Nitride Films Using RF Plasma CVD Thermally Assisted by a Tungsten Filament
- 16 January 1995
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 147 (1) , K9-K11
- https://doi.org/10.1002/pssa.2211470133
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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