Fabrication of beam steering elements and couplers with grayscale lithography using HEBS glass
- 1 January 2005
- proceedings article
- Published by Optica Publishing Group
Abstract
The fabrication of reflective, refractive and coupling optical elements using a new technique for grayscale lithography with high-energy beam-sensitive glass is discussed. These devices were used to demonstrate short-reach optical interconnects and new imaging concepts.Keywords
This publication has 1 reference indexed in Scilit:
- Continuous profile writing by electron and optical lithographyMicroelectronic Engineering, 1997