Computer modelling of field emission gun scanning electron microscope columns
- 1 January 1987
- journal article
- Published by Elsevier in Ultramicroscopy
- Vol. 21 (1) , 33-45
- https://doi.org/10.1016/0304-3991(87)90005-2
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Energy broadening in electron beams: A comparison of existing theories and Monte Carlo simulationJournal of Vacuum Science & Technology B, 1985
- UHV-SEM studies of surface processes: Recent progressUltramicroscopy, 1983
- Performance of a field emission gun scanning electron microscope columnUltramicroscopy, 1980