Silicon micromachining for micro-replicationtechnologies
- 29 September 1994
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 30 (20) , 1672-1674
- https://doi.org/10.1049/el:19941121
Abstract
Silicon micromachining is applied to the fabrication of highly precise mould inserts to be used in the micro-replication of polymer waveguide components with integrated fibre alignment grooves. The waveguide structures with rectangular cross-section are realised by an anisotropic RIE process, whereas the integrated passive fibre alignment grooves are formed by anisotropic wet chemical etching. Two processes (a two-mask process and a selfaligned one-mask process) are described for the accurate alignment of waveguide structures and fibre alignment grooves.Keywords
This publication has 1 reference indexed in Scilit:
- Fabrication of low loss polymer waveguides using injection moulding technologyElectronics Letters, 1993