Alkenylsilane Sulfone Copolymers and Terpolymers as Electron‐Beam‐Sensitive Positive Resists for Two‐Layer Systems
- 1 November 1985
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 132 (11) , 2809-2810
- https://doi.org/10.1149/1.2113673
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: