Auger Electron Spectroscopy in the Scanning Electron Microscope: Auger Electron Images
- 1 November 1971
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 19 (9) , 315-318
- https://doi.org/10.1063/1.1653933
Abstract
A two‐dimensional surface chemical analysis over an area on a metal specimen has been accomplished by means of high‐spatial‐resolution Auger electron spectroscopy in a computerized scanning electron microscope. The experimental results are presented in graphic form by the new method of Auger electron imaging.Keywords
This publication has 3 references indexed in Scilit:
- AUGER ELECTRON SPECTROSCOPY IN SCANNING ELECTRON MICROSCOPY: POTENTIAL MEASUREMENTSApplied Physics Letters, 1970
- HIGH SENSITIVITY AUGER ELECTRON SPECTROMETERApplied Physics Letters, 1969
- Auger Electron Spectroscopy of fcc Metal SurfacesJournal of Applied Physics, 1968