Positive and negative ions in silane and disilane multipole discharges
- 25 May 1984
- journal article
- Published by Elsevier in International Journal of Mass Spectrometry and Ion Processes
- Vol. 57 (3) , 249-281
- https://doi.org/10.1016/0168-1176(84)85082-x
Abstract
No abstract availableKeywords
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