Impurity gettering to secondary defects created by MeV ion implantation in silicon
- 1 September 1998
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 84 (5) , 2459-2465
- https://doi.org/10.1063/1.368438
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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