Blazed gratings and Fresnel lenses fabricated by electron-beam lithography
- 1 December 1982
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 7 (12) , 578-580
- https://doi.org/10.1364/ol.7.000578
Abstract
A blazing technique using electron-beam lithography to achieve higher efficiency of gratings and Fresnel lenses is described. Transmission-type blazed gratings have been formed in polymethyl methacrylate films. As a result of measurement, we found that their diffraction efficiency of the first order in these gratings amounts to as much as 60 to 70% at 0.633 μm. Fresnel lenses of 1-mm diameter and 5-mm focal length, which have a sawtooth relief profile, have been also fabricated, and the experimental results showed high-efficiency performance (about 50%) and nearly diffraction-limited focusing.Keywords
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