Nonlinear optical waveguide fabrication by direct electron-beam irradiation and thermal development using a high Tg polymer

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Abstract
A nonlinear optical waveguidefabrication process for use with dye doped polymer is described. The ridge-type channel waveguide containing the chromophores was fabricated by direct electron-beam irradiation. The electron beam with an energy of 25 kV and dose of 1000 μC/cm 2 was exposed directly onto the dye doped polymerfilm, and then thermal development and corona-poling were performed simultaneously. We could also demonstrate the periodically poled nonlinear optical polymerwaveguide on the basis of this new process.