Microfabricated nonoptical chemical sensors

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Abstract
In the past two decades, there has been growing interest in new types of chemically sensitive devices based on the photolithographic batch processing employed by the semiconductor industry. This article reviews several classes of chemical sensors including electrochemical devices based on potentiometry and amperometry, chemical sensors based on thermal processes, and acoustic wave devices. Devices based on dielectric property variation, the core of spectroscopy, are not treated here since many reviews of these topics are available. The article touches on the device principles and reviews some of the more recent developments in each class.