Substrate removal of AlGaN/GaN HEMTs using laser lift‐off

• 11 April 2005
• journal article
• Published by Wiley in physica status solidi (c)
• Vol. 2  (7) , 2655-2658
• https://doi.org/10.1002/pssc.200461355

Abstract

Keywords

• PACKAGE
• REMOVED
• SUBSTRATE
• HEMT
• ALGAN/GAN
• USING LASER LIFT