Thermal desorption of InSb surface oxides
- 1 November 1991
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 9 (6) , 2996-2998
- https://doi.org/10.1116/1.577162
Abstract
We have investigated methods of chemical preparation and thermal treatments of InSb substrates to produce InSb surfaces suitable for subsequent molecular beam epitaxy. Etching in a solution of lactic acid: HNO3:HCl was shown to produce an oxide surface layer which could be thermally desorbed. Growth on surfaces prepared in this manner produced precipitate-free substrate–epilayer interfaces.Keywords
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