Low Energy X-Ray Spectra Measured with a Mercuric Iodide Energy Dispersive Spectrometer in a Scanning Electron Microscope
- 1 February 1986
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Nuclear Science
- Vol. 33 (1) , 355-358
- https://doi.org/10.1109/tns.1986.4337118
Abstract
A mercuric iodide energy dispersive x-ray spectrometer, with Peltier cooling provided for the detector and input field effect transistor, has been developed and tested in a scanning electron microscope. X-ray spectra were obtained with the 15 keV electron beam. An energy resolution of 225 eV (FWHM) for Mn-Kα at 5.9 keV and 195 eV (FWHM) for Mg-K line at 1.25 keV has been measured. Overall system noise level was 175 eV (FWHM). The detector system characterization with a carbon target demonstrated good energy sensitivity at low energies and lack of significant spectral artifacts at higher energies.Keywords
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