A Modified Closed Box System for the Diffusion of Boron in Silicon

• 1 January 1960
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 107  (11) , 911
• https://doi.org/10.1149/1.2427540

Abstract

Keywords

• MODIFIED CLOSED BOX
• DIFFUSION OF BORON
• BORON IN SILICON
• CLOSED BOX SYSTEM