Plasma chemistry of RF discharges in CO2laser gas mixtures

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Abstract
The authors have used mass spectrometry to investigate the changes in the composition of the molecular species in radio frequency excited discharges in typical waveguide laser CO2-N2-He(H2O) mixtures and discharge conditions. The initial rate of dissociation of CO2 is approximately 10-90% in approximately 1 s: final dissociation levels are determined by back reactions with water vapour. The dissociation increases with power but is independent of frequency (29-200 MHz). Comparison of the flowing discharge and afterglow environments shows considerable differences with large amounts of the oxides of nitrogen and radical species present in the former.