Metallurgy of Al–Ni–Ge ohmic contact formation on n-GaAs

• 1 September 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 13  (5) , 2081-2091
• https://doi.org/10.1116/1.588081

Abstract