Three-dimensional structures for micro-optical mechanical systems in standard CMOS

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Abstract
A design is presented and tested to build and actuate reflection based 3D micro-opto- mechancial systems in standard CMOS using only a single maskless post-processing step. We have built two generations of structures and actuated them at various frequencies. The initial design uses the various components of CMOS to make a rigid box being pulled against the substrate. Results and photos are presented to show the actuation. Possible developments which take advantage of the CMOS underlying the structure are discussed.

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