Laser Photolytic Deposition of Thin Films
- 1 January 1982
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Plasma-enhanced chemical vapor deposition of tungsten filmsApplied Physics Letters, 1982
- VUV fluorescence following photodissociation of N2O at 193 nmThe Journal of Chemical Physics, 1981
- Laser photodeposition of refractory metalsApplied Physics Letters, 1981
- The Deposition of Molybdenum and Tungsten Films from Vapor Decomposition of CarbonylsJournal of the Electrochemical Society, 1970