Analysis of the stroboscopic waveform mode in scanning electron microscopy
- 1 August 1987
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 20 (8) , 1011-1015
- https://doi.org/10.1088/0022-3735/20/8/011
Abstract
An analysis is presented of the stroboscopic waveform mode for electron beam testing of integrated circuits. The significance of the analysis is the formulation of the relationships between the duration and phase increment of the electron beam and the bandwidth of the signal to be measured. The results provide a strategy for obtaining efficient settings of the system parameters. The analysis is supported by an examination of experimental data.Keywords
This publication has 3 references indexed in Scilit:
- Signal-to-noise ratio in the stroboscopic scanning electron microscopeJournal of Physics E: Scientific Instruments, 1985
- Stroboscopic scanning electron microscopyJournal of Physics E: Scientific Instruments, 1968
- A Theory of Scanning and Its Relation to the Characteristics of the Transmitted Signal in Telephotography and TelevisionBell System Technical Journal, 1934