A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures
- 30 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
In this paper, two approaches to self-consistent electromechanical analysis of three-dimensional micro-electro-mechanical structures are described. Both approaches combine finite-element mechanical analysis with multipole-accelerated electrostatic analysis, the first using a relaxation algorithm and the second using a surface/Newton generalized conjugate-residual scheme. Examples are given to demonstrate the relative merits of the two approaches.Keywords
This publication has 3 references indexed in Scilit:
- Fabrication, packaging, and testing of a wafer-bonded microvalvePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Electrostatic Comb Drive Levitation And Control MethodJournal of Microelectromechanical Systems, 1992
- FastCap: a multipole accelerated 3-D capacitance extraction programIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1991