Annealing environment effects in solid-phase epitaxial regrowth of Fe-implanted Al2O3
- 1 February 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 46 (1-4) , 137-143
- https://doi.org/10.1016/0168-583x(90)90685-n
Abstract
No abstract availableKeywords
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