Cryopumped beam mass spectrometry
- 1 May 1981
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 19 (1) , 104-108
- https://doi.org/10.1116/1.570997
Abstract
A system is described for the sampling of chemically reactive species from a plasma reactor in a mass spectrometer integrated in a 20 K cryopump. The performance of this system is characterized by high detection sensitivity and low background interference. The application of the sampling method with appearance-potential discrimination measurements of chemically active species is demonstrated.Keywords
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