UHV application of spring-loaded Teflon seals
- 1 November 1978
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 49 (11) , 1518-1519
- https://doi.org/10.1063/1.1135303
Abstract
Large, bakeable, rotatable ultrahigh vacuum seals capable of operation at 10(-11) Torr are described. They employ doubly differentially pumped commercially available spring-loaded Teflon seals. A static version is very convenient for quick access as it requires nearly negligible sealing force other than atmospheric force.Keywords
This publication has 7 references indexed in Scilit:
- Energy accommodation and reactivity of O2 on tungstenApplied Physics A, 1977
- A Sliding Seal for Ultrahigh VacuumJournal of Vacuum Science and Technology, 1971
- Molecular Beam Reactive Scattering Apparatus with Electron Bombardment DetectorReview of Scientific Instruments, 1969
- Sealing Large Ultrahigh-Vacuum Flanges with Polytetrafluoroethylene GasketsJournal of Vacuum Science and Technology, 1969
- A mass spectrometry study of the evaporation and pyrolysis of polytetrafluorethyleneVacuum, 1969
- A Mass Spectrometric Study of the Outgassing of Some Elastomers and PlasticsJournal of Vacuum Science and Technology, 1965
- Large Rotary Vacuum SealReview of Scientific Instruments, 1963