Novel Rf-Plasma System for the Synthesis of Ultrafine, Ultrapure Sic and Si₃N₄

This publication has 5 references indexed in Scilit:

• Laboratory analogues to cosmic dust
  Earth, Moon, and Planets, 1978
• The Synthesis of Boron Carbide in an RF Plasma
  Journal of the Electrochemical Society, 1975
• Use of Radio-Frequency Plasma in Chemical Synthesis
  Published by Elsevier ,1975
• Preparation of Silicon Carbide from Methylchlorosilanes in a Plasma Torch
  Product R&D, 1972
• The SiC phase in the system SiCB4CC
  Materials Research Bulletin, 1969