Selected-area deposition of multiple active films for conductometric microsensor arrays
- 31 August 1996
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 34 (1-3) , 209-212
- https://doi.org/10.1016/s0925-4005(96)01823-0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Growth of SnO2 films on micromachined hotplatesApplied Physics Letters, 1995
- Particle growth of palladium on epitaxial tin oxide thin filmsJournal of Vacuum Science & Technology A, 1994
- Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processingIEEE Electron Device Letters, 1993