A Novel Low Field Electron Emission Polyerystalline Diamond Microtip Arrays For Sensor Applications
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 182-185
- https://doi.org/10.1109/sensor.1995.721775
Abstract
Electron field emission from an array of patterned pyramids of polyerystalline diamond for microsensor applications has been investigated. Selective deposition and molding of polycrystalline diamond film in a silicon cavity mold and subsequent creation of free standing polycrystalline diamond diaphragm with diamond pyramidal-microtips has been achieved.Keywords
This publication has 4 references indexed in Scilit:
- Fabrication and characterization of silicon field emission diodes and triodesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Demonstration of low voltage field emissionIEEE Transactions on Electron Devices, 1991
- Field-emitter arrays for vacuum microelectronicsIEEE Transactions on Electron Devices, 1991
- Physical considerations in vacuum microelectronics devicesIEEE Transactions on Electron Devices, 1989